F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters StdPbc-0623 cleaved wafers can be accepted

cleaved wafers can be accepted as long as it does not cause a significant drop in the sensitivity (from a quarter to a half of a wafer)

in a standardized way

completeness

SEMI E112-1017 (technical revision)

F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters StdPbc-0623 cleaved wafers can be acceptedNOTICE: This Document was completely rewritten in 2019. The purpose of this Document is to define a comprehensive standard test sequence to qualify the particle filtration efficiency achievable using point of use (POU) gas filters. This Test Method defines an evaluation method for POU filters of various media (e. g., metallic, ceramic, and polymeric) typically used for filtering inert and process gases in semiconductor applications. POU filters are