MF198200 - SEMI MF1982 - Test Method for Analyzing Organic Contaminants on Silicon Wafer Surfaces by Thermal Desorption Gas Chromatography Revision:SEMI MF1982-0714 - Superseded 表面処理と表面清浄装置

表面処理と表面清浄装置

• edge roundness

RGV and OHT) and the passive equipment (e

This Document references SEMI E78

MF198200 - SEMI MF1982 - Test Method for Analyzing Organic Contaminants on Silicon Wafer Surfaces by Thermal Desorption Gas Chromatography Revision:SEMI MF1982-0714 - Superseded 表面処理と表面清浄装置Organics are present in many materials, such as plastics, lubricants, cleansers, soaps, and living tissues. Some of these compounds are volatile and others can become airborne through chemical reactions, heating, abrasion, or outgassing. Organic compounds are present in many materials such as parts and components for cleanrooms, carriers, FOUP, developers, and organic removers. Some of these organic compounds are volatile and some can be discharged