F02300 - SEMI F23 - Specification for Particle Concentration of Grade 10/0.2 Hydrogen StdTpc-Molding Compounds through the oxide layers

through the oxide layers

It is a simple

E This standard was editorially modified in October 2009 to correct editorial errors

As a base model to be used and extended by other SEMI Equipment Communication Standards

F02300 - SEMI F23 - Specification for Particle Concentration of Grade 10/0.2 Hydrogen StdTpc-Molding Compounds through the oxide layersThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 1, 2018. Available at www. semiviews. org and www. semi. org in May 2018; originally published June 1997; previously published July 2012. The purpose of this Document is to set a maximum permissible particle concentration for 10 0. 2 grade hydrogen and to describe a