F10600 - SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector Revision:SEMI F106-0308 - Superseded This determination is not included

This determination is not included in the main part of the Test Method

if at present more than one standard test method for verification of a specific parameter exists (refer to Table 1)

自家使用のため内部で堆積を行う組織，および販売目的で堆積物を製造する会社は共に，彼らのパーティクル堆積システムがSEMI M52の要求を満たす堆積を保証するため，本テスト方法を適用することが出来る。

and the specified orientation of the flat in the plane of the wafer surface

F10600 - SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector Revision:SEMI F106-0308 - Superseded This determination is not includedThis Standard was technically approved by the global Facilities Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2008. This Document defines the inboard helium leak test method for gas delivery systems. It covers both conventional metal face sealing and surface mount gas