P03500 - SEMI P35 - Terminology for Microlithography Metrology StdVol-Flat Panel Display

P03500 - SEMI P35 - Terminology for Microlithography Metrology StdVol-Flat Panel DisplayThis Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www. semiviews. org and www. semi. org in September 2013. Originally published February 2000; previously published November 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status

9995% or higher

pressure sensors

It applies to both single-crystalline and multi-crystalline Si wafers

Wherever this Document makes reference to reticles

service personnel

semiconductor fabrication and flat panel display) factory

本書は，製品の寿命が尽きた際の半導体製造装置 (SME) またはそのコンポーネントの環境への影響を最小限にするための設計上の指針となるものである。

The scope of this Document is grades of phosphoric acid used in the photovoltaic industry

SEMI M1-0611 (technical revision)

ISPM needs to be easily integrated into new or existing process equipment and the acquisition as well as the analysis of the particle data needs to be automated

construction spending

scanning electron beam