E10900 - SEMI E109 - レチクルおよびポッド管理に関する仕様(RPMS) Revision:SEMI E109-0305 - Superseded this Standard has been written

this Standard has been written so that injection-molded plastic FOSBs can be manufactured in conformance with it

Principles are given for a standardized measurement method

These EPDs are

Two test methods are covered as follows:

E10900 - SEMI E109 - レチクルおよびポッド管理に関する仕様(RPMS) Revision:SEMI E109-0305 - Superseded this Standard has been writtenGlobal Information & Control CommitteeNorth American Information & Control Committee20041210North American Regional Standards Committee20052www. semi. org2005320017200411 ReticleID AMHS ID Subordinate Document: SEMI E109. 1 0704 PODRPMSSEC II Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E15 Specification for Tool Load port SEMI E30 Generic Model for Communications and Control of SEMI