E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded This Standard specifies measurement conditions

This Standard specifies measurement conditions and methods for describing the visual color quality in three-dimensional (3D) color space

The system concept involves mating a door on a cassette container to a door on an equipment canopy and transferring the cassette into

SEMI E73 — Specification for Vacuum Pump Interfaces – Dry Pumps

1  This Standard contains terminology and reference documents used in SEMI E49

E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases Revision:SEMI E77-1104 (Reapproved 0815) - Superseded This Standard specifies measurement conditionsThe purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC. This procedure describes a method to determine the MFC conversion factor and function between two gases. This Standard provides a common basis for communication between manufacturers and users. The intent of this Standard is not to suggest any