TEL Tokyo Electron 5087-403471-16 Duct (COT) Assembly Lithius Working Surplus

TEL Tokyo Electron 5087-403471-16 Duct (COT) Assembly Lithius Working SurplusTEL Tokyo Electron 5087 403471 16 Duct (COT) Assembly Lithius Working Surplus Inventory # A 18020 Part No: 5087 403471 16 Model No: DUCT(COT)ASSY Removed from a TEL Tokyo Electron Clean Track Lithius 300mm System Installed Components 5004 100011 11 DUCT(1A),EXH (509510054612 5010 402175 12 BLOCK,EHX (Qty. 2) 5010 404809 11 PACKING (Qty. 2) 5010 407282 11 COVER,DUCT (Qty. 2) 028 007152 1 FITTING,RESIN EC4 M5 C1S (Qty. 2) 027 005637 1 O RING KALREZ

Asyst Part No: 368789-0

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Inventory # 20454

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Inventory # A28108

Includes factory certificate of compliance

BEAM FILTER MONITOR

Inventory # A-17998

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