E05421 - SEMI E54.21 - MOTIONNET®用センサ／アクチュエータネットワーク（SAN）通信に関する仕様 Revision:SEMI E54.21-1110 - Superseded 2 Because the fitting locations

2  Because the fitting locations and procedures differ considerably between the two methods

the proposed qualification would be helpful to refer to in similar low light application like OPV/DSC/PSC

SEMI E87-0706E (editorial revision)

Current edition approved by the Japanese Regional Standards Committee on April 28

E05421 - SEMI E54.21 - MOTIONNET®用センサ／アクチュエータネットワーク（SAN）通信に関する仕様 Revision:SEMI E54.21-1110 - Superseded 2 Because the fitting locationsglobal Information & Control Committee2010120global Audits and Reviews Subcommittee20102www. semi. org SEMI E155 SANSEMI E54MOTIONNET SEMI E54 Referenced SEMI Standards SEMI E54 Sensor Actuator Network Standard SEMI E54. 1 Standard for Sensor Actuator Network Common Device Model SEMI E54. 3 Specification for Sensor Actuator Network Specific Device Model for Mass Flow Device SEMI E54. 10 Specification for Sensor Actuator Network Specific Device Model