Aera FC-D980C Mass Flow Controller MFC Reseller Lot of 6 Working Surplus img{max-width:100%} TEL Tokyo Electron 3M81-034198-12

img{max-width:100%} TEL Tokyo Electron 3M81-034198-12 Process Board PCB TYB62K-1/DCFA Trias Working

080 HYBRID A

but the filters are new

Gas/Range: 15 SLM

Aera FC-D980C Mass Flow Controller MFC Reseller Lot of 6 Working Surplus img{max-width:100%} TEL Tokyo Electron 3M81-034198-12Aera FC D980C Mass Flow Controller MFC Reseller Lot of 6 Working Surplus Part No: FC D980C Interface: Micro Fitting: 4VCR (1 4") May Require Calibration Reseller Lot of 6 Included Components Part No: 3030 14865; 100 SCCM, O2 (Qty. 2) Part No: 3030 14866; 100 SCCM, SF6 (Qty. 2) Part No: 3030 15850; 200 SCCM, Cl2 (Qty. 2) This item is working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item