MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions StdPbc-1113 as well as complex control

as well as complex control devices such as robots

SEMI M1-1109 (technical revision)

no materials requirements or microcontamination limits are given

원본은 1992년에 발행되었고

MS01100 - SEMI MS11 - Specification for Microfluidic Port and Pitch Dimensions StdPbc-1113 as well as complex control1 Purpose 1. 1 This Specification provides the standard pitch dimensions for developers of microfluidic devices. 2 Scope 2. 1 This Specification is limited to providing a specific set of values for pitch in a microfluidic interface design, and port size, that ensure that two mating components fit properly. Referenced SEMI Standards (purchase separately) None. Revision History SEMI MS11 0318 (Reapproved 0525) SEMI MS11 0318 (first published)