E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMI E189-0524 - Superseded SEMI E123 — Specification for

SEMI E123 — Specification for Handler Equipment Specific Equipment Model (HSEM)

This Safety Guideline covers essential safety issues for load ports and wafer handling robots

and density

Traceability Requirements

E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMI E189-0524 - Superseded SEMI E123 — Specification forE This Standard was editorially modified to correct a publication error. A correction was made to Figure 1. This Specification provides a standardized behavior for host communication with manufacturing equipment during the removal, installation and usage of consumables and durables. This Specification defines objects and state models that define the interaction between the host and equipment in the following scenarios: Durable removal, installation,