D08800 - SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package Revision:SEMI D88-0325 - Current and discussions related to semiconductor

and discussions related to semiconductor subjects

Electroplating & Sputtering: Metal deposition techniques used in manufacturing

SEMI E87-0706 (technical revision)

• Description of the specification conventions used

D08800 - SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package Revision:SEMI D88-0325 - Current and discussions related to semiconductor1 Purpose 1. 1 This Standard specifies the electrostatic properties required for cases used for transportation of photomasks and blanks used in FPD manufacturing to reduce the risk of electrostatic discharge (ESD) damage to photomasks and blanks during transportation or storage. 2 Scope 2. 1 This Standard provides the specifications of the electrostatic properties of the basic packaging of cases used for transportation of photomasks and blanks used in