G09500 - SEMI G95 - 後工程における450mmウェーハ用テープフレームカセットのためのロードポートの機械的インタフェースの仕様 StdPbc-0225 3 This Specification defines and

3  This Specification defines and provides examples of silicon epitaxial wafer requirements for both discrete semiconductor device manufacture and integrated circuit device manufacture

The Test Method is applicable to both bulk and epitaxial silicon

test methods

This Standard includes the measuring

G09500 - SEMI G95 - 後工程における450mmウェーハ用テープフレームカセットのためのロードポートの機械的インタフェースの仕様 StdPbc-0225 3 This Specification defines andAssembly & Packaging Global Technical Committee201364global Audits and Reviews Subcommittee20136www. semiviews. org www. semi. org 450mm450TFC450TFC 450mm450TFC450TFC 450TFC PGVAGVOHT450TFC Referenced SEMI Standards SEMI G88 Specification for Tape Frame for 450 mm Wafer SEMI G92 Specification for Tape Frame Cassette for 450 mm Wafer