E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded The source is normally a

The source is normally a polarized laser beam in combination with a high-contrast prism polarizer

This Standard addresses the functional requirements for a generic Carrier ID Reader/Writer interface with an upstream controller

of fiducial notches on silicon wafers fall within specified limits

hereinafter collectively referred to as CC-Link IE

E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded The source is normally aThis Standard establishes a Specific Equipment Model (SEM) for automated material handling system (AMHS) (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of AMHS SEM equipment into an automated (e. g., semiconductor fabrication) factory. This Document